Semiconductor Equipment Assembly Facility Cleanroom Project
This project is a cleanroom construction project for a semiconductor equipment assembly workshop. Construction commenced in December 2025, and the scope includes a Class 10,000 cleanroom with a 7-meter ceiling. The project is carried out in strict accordance with cleanroom facility specifications and semiconductor assembly process requirements, covering systems such as clean enclosures, high-efficiency air supply, differential pressure control, temperature and humidity regulation, electrostatic discharge (ESD) protection, and sealing and dust prevention. These measures ensure that cleanliness, airflow organization, micro-vibration, and environmental parameters meet required standards, providing a reliable dust-free production environment for high-precision semiconductor equipment assembly.
The project complies with ISO 14644 and GB 50073 cleanroom standards, employing three-stage filtration, fan filter unit (FFU) air supply, gradient differential pressure control, and dust-tight sealing techniques. It comprehensively ensures cleanliness, temperature and humidity, static pressure differential, illumination, and micro-vibration control, meeting the stringent requirements of high-precision semiconductor equipment assembly for the production environment.
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